Specifications

펌핑 속도 공기 질소(@50Hz 또는 최대 @기본 설정) 0.090
최대 압력 5.000 × 10⁻⁸

TURBOVAC 90 iX - DN 63 CF (Anybus)

파트 번호:810041V3000

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TURBOVAC i/iX

TURBOVAC i is a well-proven turbomolecular pump platform ranging from 90 to 1450 l/s. TURBOVAC i comes with the latest hybrid bearing design offering a permanent magnet upper bearing paired with an oil-free lower mechanical bearing offering the cleanest high vacuum conditions.

 

With TURBOVAC i we offer variants covering UHV (Ultra High Vacuum), throughput IND (Industrial) as well as iR (radiation robust) variants with remote electronics. TURBOVAC i pumps are available with a compact interface offering the control of up to two accessories, basic RS485, USB and DIGITAL I/O control. The TURBOVAC i series also offers the full spectrum of field bus support. The universal connection called "Anybus" enables communication via Profibus, Ethernet IP, ProfiNET as well as EtherCAT through selectable modules.

 

TURBOVAC iX also offers the Anybus interface, the ability to control your fore vacuum pump, and up to 6 accessories, a gauge interface turning the pump into a full vacuum control solution. Along with single inlet pumps, we offer a wealth of multi-inlet, cartridge pumps, and customized products via our Customer Focused Engineering team - please come and talk to our sales teams.

 

TURBOVAC i pumps, in general, come stand-alone - the suitable power supply unit, comms/power cables, and cooling options need to be ordered separately. TURBOVAC 1350, 1450 and the 850, 950 IND variants always come already equipped with a water cooling block.

Features and Benefits

  • Superior performance - high pumping speed for light gases combined with high compression
  • Stress-free operation
  • High flexibility in our platform for standard and especially in customized products
  • Higher resistance to particles
  • Smart interfaces and intuitive software platform with LeyAssist
  • Operation in any orientation

치수 높이 0.200
치수 길이 0.114
치수 너비 0.114
치수 코멘트 The dimensions length, width and height try to describe the outer shape of this particular product in its typical orientation when standing on the ground. We always recommend checking the detailed dimensions given in 2D drawings in the instruction manual or the 3D shapes given in 3D models.
흡입구/배출구 플랜지 연결 DN 63 CF (4.5") | DN 16 ISO-KF (NW16)
제품 인증 CE
RoHS
REACH
중국 RoHs - 중국 물질 함량 선언
CSA (C22.2 No.61010-1-12)
UL(61010-1 제3판)

주변 작동 온도 최대값 40.00
최대 주변 보관 온도 70.00
주변 작동 온도 최소 5.00
최소 주변 보관 온도 -15.00
자기장 저항 최대(최악의 방향 포함 - 자세한 내용은 당사에 문의하십시오) 5.500 × 10⁻³ T

분류 건식 또는 습식 펌프 Dry

최대 압력 5.000 × 10⁻⁸
펌핑 속도 공기 질소(@50Hz 또는 최대 @기본 설정) 0.090
펌핑 속도 아르곤 0.083
헬륨 펌핑 속도 0.090
수소 펌핑 속도 0.078
최대 배압 1400.00
압축 비율 아르곤 1.000 × 10¹¹

냉각수 유량 최소 8.333 × 10⁻⁶
냉각수 최대 유량 1.667 × 10⁻⁵
허용 공급 냉각수 압력 - 최소 및 최대 4.000 × 10⁵
4.000 × 10⁵
제품명 설명 장바구니 담기
Anybus Module - RS232 410300V0902
Anybus Module - RS485 410300V0903
Anybus Module - Profibus M40 410300V0904
Anybus Module - Ethernet 410300V0906
Anybus Module - Profinet IRT 410300V0905
Anybus Module - EtherCAT 410300V0907
Heater band - DN 63 CF 230V 800137V0003
Heater band - DN 63 CF 115V 800137V0004
Vibration Absorber - DN 63 CF 500070
Inlet screen coarse - DN 63 CF 800132V0011
Splinter guard - DN 63 CF fine 800132V0012
Vent valve - 24V DC - 1/8" BSPP (G) Male (450mm) 800120V0012
Connector Accessory Y-connector - TURBOVAC i / TURBOLAB M8 800110V0020
Power Failure Vent Valve - 24V DC - 1/8" BSPP (G) Male (450mm) 800120V0022
Purge Valve - EM 24V DC - 1/8" BSPP (G) Male (450mm) 800120V0013
Communication cable - USB cable 2.0 type A/B 1.8m 800110V0108
Start-stop switch for TURBOVAC i/iX 800110V0021
Cable Accessory - TURBOVAC i / TURBOLAB M8-M8 5m 800103V0003
Cable Accessory - TURBOVAC i / TURBOLAB M8-M8 2m 800110V0016
Air Gas Filter - TURBOVAC 1/8" BSPP (G) Male 800110V0022
Water Cooling Unit - TURBOVAC i 1/8" BSPP (G) -- tube - (90/250/350/450) 800135V0005
Water Cooling Unit - TURBOVAC i 1/4" BSPP (G) -- tube - (90/250/350/450) 800135V0006
Plug DC - 24/48 V DC TURBOVAC i/iX (90/250/350/450) 800090V0000
Cable Power DC - TURBOVACi TURBO.POWER integra 3m 24V DC 800096V0300
TURBO.POWER integra 800100V0003
Set Screws, Nuts and Washers for CF Flanges - pk16 M8 x 45mm screw DN 63 - 100 CF (for joints with VAT Gate Valves) 83913
Cable Power DC - TURBOVACi TURBO.POWER integra 1m 24V DC 800096V0100
Set Screws, Nuts and Washers for CF Flanges - pk16 M8 x 50mm screw DN 63 - 100 CF (for joints with VAT Gate Valves) 83913V01
Mounting Kit - Turbo.Power Intergra to TURBOVAC 90 250 i 800100V0005
Air Cooling Unit - TURBOVAC 90 - 250i axial 800136V0008
Cable Power DC - TURBOVACi TURBO.POWER integra 5m 24V DC 800096V0500
THERMOVAC TTR 91 RN - 16KF 21L1011100
PENNINGVAC PTR 90 RN - DN40CF 23L0041100
Mounting kit TURBOVAC - DN 63 CF 800134V0011
TURBO.CONTROL i 800100V0004